平板显示玻璃化学减薄工艺及不良案例分析
Glass Chemical Thinning Process and Analysis of Unsuccessful Cases
摘要 针对目前传统的减薄方法及化学减薄后玻璃基板表面出现的减薄不良,分析表面不良问题产生的原因,为平板显示用玻璃基板的生产和薄化技术提供参考.文章主要从TFT-LCD面板进行减薄后,表面不良产生的原因进行分析.
Abstract:
Aiming at the defects on the surface of the glass substrate after the traditional thinning process and the chemical thinning,the causes of the surface problems were analyzed.The results could be a valuable reference for the production and thinning process of the flat panel display glass substrate.The defects on the surface of TFT-LCD panel after thinning were mainly diagnosed.
作者: 李青 王俊峰
Author: LI Qing WANG Junfeng
作者单位: 东旭集团有限公司,河北石家庄050021;平板显示玻璃技术和装备国家工程实验室,河北石家庄050035
刊 名 玻璃与搪瓷 ISTIC
Journal Glass & Enamel
年,卷(期): 2017, 45(6)
分类号: TQ171.6+87
在线出版日期: 2018年1月9日