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Provided are a stage device capable of suppressing elastic deformation of a stage, and a charged particle beam device and an optical inspection device that include the same. The stage device comprises a stage for holding a sample, a horizontal drive unit for driving the stage in a horizontal direction, a vertical drive unit for driving the stage in a vertical direction, and a control unit for controlling the horizontal drive unit and the vertical drive unit, and is characterized in that the control unit inverts the phases of the horizontal drive unit and the vertical drive unit at a specific frequency calculated on the basis of frequency characteristics when the stage is driven in the horizontal direction and frequency characteristics when the stage is driven in the vertical direction.

[Problem] An alternative, accurate positioning manipulator is desired. [Solution] The parallel positioning manipulator includes a retainer, a base plate, and a plurality of translational joint actuators. Each actuator includes an actuator joint having five degrees of freedom (DOF) on either the base plate or the retainer. When one or more of the actuators extend or retract, the pivot points or 5DOF actuator joints of the remaining actuators are made to move in the direction of any axis other than the primary operating axis of the actuator. [Selected Figure] Figure 17B

本实用新型涉及仪表游丝技术领域，且公开了一种便于安装的仪表游丝，包括底盘，所述底盘的上方设置有固定组件与防护组件。该一种便于安装的仪表游丝，通过设置多个弹性板和L型摆动杆的设计，优化了游丝本体的安装、防护和拆卸过程，安装时，弹性板通过挤压块与基体的螺纹连接，对游丝本体内圈施加均匀压力，简化了安装步骤，同时避免了因受力不均导致的变形或损坏，确保了游丝本体的稳定性和可靠性，L型摆动杆和接触杆的配合，防止了游丝本体在摆动过程中因重力、惯性或振动而发生形变或塌陷，延长了使用寿命，在拆卸时，挤压块与基体分离后，弹性板自动复位，L型摆动杆在连接丝的牵引下远离游丝本体，实现了快速拆卸，便于维修和更换。

本发明涉及层叠装置以及层叠系统。层叠装置(100)具备：层叠台(10)，具有层叠面(10a)，用于将层叠对象物(1)层叠于层叠面；修正机构(20)，能够使层叠台(10)沿与层叠面平行的方向移动；驱动机构(30)，能够使层叠台(10)沿与层叠面正交的方向移动；以及直动机构(40)，将层叠台(10)与修正机构(20)连接，在与层叠面正交的方向上具有移动的自由度，但向与层叠面平行的方向的移动受限制。驱动机构(30)具备：主体部(31)，配置于在与层叠面正交的方向上不与层叠台(10)重叠的位置；和臂部(32)，构成为从主体部(31)向层叠台(10)与修正机构(20)之间延伸而支承层叠台(10)，并能够沿与层叠面正交的方向移动。

本实用新型涉及医用设备技术领域，具体为一种带倾倒防护功能的治疗用机器，包括主机，主机的底部安装有用于提供稳定支撑力的底座，主机的外侧四个侧边拐角处均安装有用于碰撞防护的拐角防护件，拐角防护件上安装有能够进行充气的膨胀部，拐角防护件的外壁安装有能够感应主机倾倒时重力变化并控制膨胀部充气的倾倒感应部。该带倾倒防护功能的治疗用机器中，通过稳固支撑的底座、可调节的延长杆以及防滑撑杆与吸盘的协同作用，有效分散主机重量，扩大支撑面积，增强防滑能力，极大提升机器在各种放置条件下的稳定性，降低倾倒风险。通过倾倒感应部能实时精准捕捉主机重力信号变化，快速判断倾倒情况并启动防护机制。

本实用新型公开了一种剪刀式升降的开腔装置，包括：支撑组件、驱动组件和至少一对运动模组。所述支撑组件位于腔盖的顶部；所述驱动组件固定在所述支撑组件上；每对运动模组，设置于所述腔盖的上表面，关于腔盖中心对称分布。每个运动模组包括：连接部和升降部，所述连接部固定在所述腔盖上；所述升降部包括第一支撑臂和第二支撑臂，所述第一支撑臂和第二支撑臂交叉设置且二者的中间位置转动连接；所述第一支撑臂的顶端与所述支撑组件连接，其底端与所述连接部滑动连接，可沿第一方向滑动；所述第二支撑臂的顶端与所述驱动组件连接，其底端与所述连接部转动连接。本实用新型能够实现腔盖的平稳升降，提高半导体设备的安全性和使用效率。

Useful model relates to the chemical field and is intended for vertical placement of cylinders with analyzed product next to the device The task of the useful model is to ensure reliable stability of two valve cylinder when installed on horizontal surfaces The technical result of the useful model consists in creating a universal reliable and convenient device for vertical placement of cylinders of various diameters which ensures their stable position and free access to the valve The stated task is solved and the technical result is achieved by means of the presented single unit dual action device allowing to install two valve cylinders of different sizes and providing access for connection to upper and lower valves

A table unit includes: a base portion; a first linear motion mechanism including a first rail and first slider; support portion movable in first direction together with first slider, support portion including first support surface attached to first slider and second support surface spaced apart from first support surface in direction perpendicular to base surface; second linear motion mechanism including second rail and second slider; table portion movable in second direction together with second slider, table portion including first, second, third, and fourth table surfaces; third linear motion mechanism including third rail and third slider; fourth linear motion mechanism including fourth rail, attached to fourth table surface, and fourth slider; first drive portion causing first movable portion attached to third slider to perform linear reciprocating motion in first direction; and second drive portion causing second movable portion attached to fourth slider to perform linear reciprocating motion in the first direction.

FIELD: heat exchangers.SUBSTANCE: for cooling electronic and/or electrical components by immersing them in a circulating dielectric cooling fluid. The essence of the invention is that the immersion cooling device (ICD) for electronic components comprises: a tank-reservoir intended for filling it with a dielectric cooling fluid and placing cooled electronic components; wherein the tank-reservoir comprises an inlet for supplying and directing the dielectric cooling fluid to the cooled electronic components and is configured to be connected via a fluid medium to an external heat exchanger; a pump module with a circulation pump for ensuring the circulation of a dielectric cooling fluid in a circulation circuit with the provision of its flow through a bath-reservoir and an external heat exchanger for cooling the fluid circulating in the circulation circuit, wherein the pump module is located in the bath-reservoir with the possibility of its immersion in the flow of cooling fluid created by the said pump module in the operating mode of the ICD with the provision of washing the pump module with the said flow of cooling fluid together with the cooled electronic components located in the bath-reservoir in the operating mode of the ICD.EFFECT: possibility of increasing the durability and reliability of the immersion cooling device.9 cl, 3 dwg

To provide a table device capable of changing an inclination angle of a table by two actuators.SOLUTION: This table device 1 is provided with a table 10, a base 20, two actuators 30 and one support 40 laid between the table and the base, a fall preventing means 50 for preventing the fall of the actuators, a sensor 60 for detecting the inclination of the base, and a control part 70 for controlling the drive of the actuators based on the output signal of the sensor. The actuator includes a movable part 31 and a main body part 32, the movable part is connected to the table via a ball joint 33, the main body part is connected to the base via a ball joint 34, an upper end part 41 of the support is connected to the table via the ball joint, and a lower end part 43 of the support is fixed to the base. To support a table at three points by two actuators and one strut. Since the overturn preventing means is provided, the inclination angle of the table can be changed by the two actuators.SELECTED DRAWING: Figure 1